Fig. 6From: High-speed Si-Ge avalanche photodiodesa Schematic and b electric field distribution of the waveguide-coupled low-voltage Si-Ge SACM APD [94]; c Schematic cross-section of the 56 GHz waveguide-coupled Si-Ge SACM APD [95]; d Schematic cross-section of the recess-type waveguide integrated Si-Ge SACM APD [99]Back to article page