Table 5 Fabrication tolerance of the optical element
Surface | Curvature radius of the front surface (mm) | Curvature radius of the back surface (mm) | Thickness (mm) | DX/DY (mm) | TX/TY (arcsec) | Surface accuracy | Refraction index | Abbe number | Conic constant |
|---|---|---|---|---|---|---|---|---|---|
M1 | ± 3.00 | - | - | - | 1/20λ | - | - | ± 0.0002 | |
M2 | ± 1.10 | - | - | - | 1/20λ | - | - | ± 0.0005 | |
L1 | ± 0.75 | ± 2.00 | ± 0.45 | ± 0.10 | ± 15 | 1/10λ | ± 0.0005 | ± 0.10 | - |
L2 | ± 1.00 | ± 1.00 | ± 0.50 | ± 0.10 | ± 18 | 1/8λ | ± 0.0005 | ± 0.05 | - |
L3 | ± 0.75 | ± 2.00 | ± 0.50 | ± 0.25 | ± 18 | 1/8λ | ± 0.0005 | ± 0.05 | - |
L4 | ± 1.00 | ± 2.00 | ± 0.40 | ± 0.20 | ± 15 | 1/8λ | ± 0.0005 | ± 0.05 | - |
L5 | ± 0.30 | ± 0.75 | ± 0.30 | ± 0.15 | ± 18 | 1/8λ | ± 0.0005 | ± 0.03 | - |