Fig. 5
From: All-silicon photovoltaic detectors with deep ultraviolet selectivity
Spectral photoresponse of the Si3N4/n-Si photodetector and Si p-i-n photodiode. Responsivity of the Si3N4/n-Si photodetector and commercial Si p-i-n photodiode measured at diffraction wavelengths ranging from 190 to 300 nm, under the bias of − 5 V and 0 V, respectively. The dash square denotes the distinction of two detectors’ responsivity in the 260–300 nm region