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Fig. 3 | PhotoniX

Fig. 3

From: Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials

Fig. 3

Reversible and multi-level switching of Sb2Se3 phase shifters in micro-ring resonators. a Layout of a 120 μm-radius, 200 nm-gap micro-ring resonator with a 3 μm-long Sb2Se3 cell. This device is used to experimentally demonstrate b one full reversible cycle featuring some of the partial crystallization states and a total of 0.28π shift, in excellent agreement with the expected 0.09 π/µm, and c ten full cycles with excellent reproducibility. d Same ring resonator as in a featuring a drop port identical to the main coupling port. e Demonstration of phase shift of resonance dip modulation in the through port with up to 10 dB in ER modulation. f Drop port peaks for the same exact measurements shown in e with a total phase shift of 0.47π. 3.2 V and 100 µs - 1ms pulses were used to partially crystallize and a single 21 V [10.8 V] and 400 ns pulse to fully amorphize

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