Fig. 1From: Detection of surface defects and subsurface defects of polished optics with multisensor image fusionPrinciple and layout of multisensor imaging system. a Surface and subsurface structure of polished optics. b Scattering imaging principle of defects. c Fluorescence imaging principle of defects. d Different types of defects characterized by scattering image and fluorescence image. e Layout of the multisensor detection systemBack to article page