Fig. 6
From: All-silicon photovoltaic detectors with deep ultraviolet selectivity
Time-dependent and temporal photoresponse of two types of detectors, and analysis of the interfaces. a Time-dependent photoresponse of two types of Si3N4/n-Si photodetectors, under the same illumination intensity. b Single temporal photovoltaic response of the two detectors under 193 nm pulsed laser. c Nitrogen element line scan of the two interfaces between Si3N4 and Si, and the scanning step is 0.5 nm. The inset is HRTEM image of the two interfaces between Si3N4 and Si. The left is LPCVD-Si3N4, and the right is ICPCVD-Si3N4