Fig. 6

Uniformity and imaging tests of the AlN-based VUV PD array. a J_photo value distribution and b the J_photo mapping at -4 V and 0 V bias under 185 nm light illumination. c Schematic diagram of the optical path of the imaging test. The insert is a photograph of the PD array. d VUV imaging results at -4 V and 0 V bias