Fig. 4

Photoelectric performance of one single pixel device of the AlN-based VUV PD array. a J-V curves under 185 nm monochromatic light (334.2 μW·cm⁻²) and in the dark. b J-V curves under the condition of different power densities (0.6 ~ 39.5 μW·cm⁻²) of 185 nm light. c Multi-period J-T curves of 0 V, -2 V and -5 V under 185 nm light illumination. d Band structure diagram of the device under VUV illumination. e 193 nm single pulse response curve. The rise time and decay time are 13.0 ns and 73.4 ns, respectively. f 193 nm multi-pulse response curve