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Table 1 Summary of this work with comparable heterodyne sensors

From: Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride

Year /Author

Platform

/Wavelength

OFS

(Modulation)

\({f}_{OFS}\)

Resolution

On-chip detection

1991 [6] /Toda

LiNbO3

/630 nm

Serrodyne (EO)

200 kHz

3 nm

No

2001 [21] /Rubiyanto

LiNbO3

/1561 nm

Acousto-optic (SAW)

171 MHz

105 pm

No

2013 [8] /Li

SOI

/1550 nm

Serrodyne (TO)

2 kHz

 < 1 nm

No

2015 [9] /Cole

SOI

/1550 nm

SSB

(TO)

50 Hz

2 nm

Yes

(Ge-PDs)

This work

SiN,

Polymer

/1550 nm

Serrodyne

SSB

(SO)

100 kHz

2.5 MHz

10 pm

Yes

(InP-PDs)

  1. EO Electro-optic, TO Thermo-optic, SO Stress-optic