Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride

Raptakis, Adam; Gounaridis, Lefteris; Epping, Jörn P.; Tran, Thi Lan Anh; Aukes, Thomas; Kleinert, Moritz; Weigel, Madeleine; Wolfer, Marco; Draebenstedt, Alexander; Tsokos, Christos; Groumas, Panos; Andrianopoulos, Efstathios; Lyras, Nikos; Nikolaidis, Dimitrios; Mylonas, Elias; Baxevanakis, Nikolaos; Pessina, Roberto; Schreuder, Erik; Dekkers, Matthijn; Seyfried, Volker; Keil, Norbert; Heideman, René G.; Avramopoulos, Hercules; Kouloumentas, Christos

doi:10.1186/s43074-023-00105-4

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Last updated: Sun, 12 May 2024 4:08:04 Z

Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride

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