Fig. 9From: Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitrideSchematic of the circuit of a the serrodyne and b the SSB optical frequency shifter (OFS) in TriPleX. Phase heaters (PH) are used for the control of the MZIs and stress-optic modulators (SOMs) for the optical modulationBack to article page