Fig. 7From: Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitrideIllustration of the PZT thin film on top of the TriPleX structure (Left) and a corresponding SEM picture (Right). Both electrodes are placed on top of the PZT layer (top-top configuration) with a gap (W) of 9 μm. The thickness of the PZT layer (tPZT) is 2 μm. The ADS waveguide is buried under 3 μm of SiO2 top cladding (tTC)Back to article page