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Fig. 15 | PhotoniX

Fig. 15

From: Integrated heterodyne laser Doppler vibrometer based on stress-optic frequency shift in silicon nitride

Fig. 15

(Top) Spectrum from the calibration measurement with a sinusoidal vibration frequency at 159.15 Hz with a peak-to-peak displacement amplitude of 14.142 μm. (Bottom) Displacement spectrum from a loudspeaker using a sinusoidal excitation signal at 15 kHz. Bandpass filtering is applied to improve the resolution of the measurement (achievable noise floor around 10 pm/√Hz)

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