Fig. 4
From: Single-color peripheral photoinhibition lithography of nanophotonic structures
Super-resolution DLW of geometric metasurfaces with 16 phase levels. a A cell unit of the nanorod-based metasurface fabricated by SC-PPI. The cell structures are arranged at periods of P = 350 nm and with the orientation angles ϕ. b The nanorods with 16 orientation angles offer transmitted light phase responses from 0 to 2π. c-d Comparison between the metasurfaces with the inhibition beam on (c) and off (d) illustrates that the inhibition beam not only decreases the width of nanorods from 100 nm to 75 nm, but also mitigates crosslinking